ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
This paper will discuss two different techniques to measure mechanical properties of thinfilm, bulge test and nano-indentation test. In the bulge test, uniform pressure applies to one side ofthin film. Measurement of the membrane deflection as a function of the applied pressure allows one todetermine the mechanical properties such as the elastic modulus and the residual stress.Nano-indentation measurements are accomplished by pushing the indenter tip into a sample and thenwithdrawing it, recording the force required as a function of position. . In this study, modified King’smodel can be used to estimate the mechanical properties of the thin film in order to avoid the effect ofsubstrates. Both techniques can be used to determine Young’s modulus or Poisson’s ratio, but in bothcases knowledge of the other variables is needed. However, the mathematical relationship betweenthe modulus and Poisson's ratio is different for the two experimental techniques. Hence, achievingagreement between the techniques means that the modulus and Poisson’s ratio and Young’s modulusof thin films can be determined with no a priori knowledge of either
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/40/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.33-37.969.pdf
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