ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
Embossing lithography is one of the most promising technologies for mass production ofnano-scale structures. To advance the industrialization of embossing lithography, fabrication of lowcost, high mechanical strength embossing template is essential. Electroformed Ni template can beused as an embossing template if its poor anti-adhesive property is fixed by proper releasing layertreatment, especially, when it is used with sticky thermoset polymer.In this experiment, quartz master template with 200nm to 2um sized surface protrusions wasfabricated and used to emboss the PMMA coated Si wafer. Then the embossed PMMA layer wascoated with metal seed layer (Ni) and electroplating of Ni was followed to fabricate Ni template.To apply anti-stiction SAM layer, SiO2 and Si layer was coated on Ni template. With properanti-stiction treatment of Ni template, sub-micron patterns were successfully transferred to stickythermoset polymers such as epoxy resin using Ni template without any degradation of anti-adhesiveproperty
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.124-126.147.pdf
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