ISSN:
1432-0630
Keywords:
PACS: 42.62.Cf; 52.75.Rx; 81.20.Wk
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. For electron beam nanolithography and scanning electron microscopy applications, an electrostatic electron lens system called a microcolumn must be assembled. In order to reduce aberrations, laser drilling of the assembled microcolumn system should be highly beneficial. We have drilled micron-size apertures on silicon substrates including molybdenum and tantalum using a 1.064 μm Nd:YAG laser. In this work, a layer-by-layer evaporation technique using multiple pulse treatment (MPT) is employed in order to minimize melting of the crater wall and maximize the evaporation of the bottom layer of the crater. The machining conditions of an Nd:YAG laser pulsed in the TEM00 mode for ceramic, silicon, and molybdenum diaphragms are optimized. We obtain micron-size apertures for electron beam microcolumn applications such as electron lenses.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390051461
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