Library

feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A Suss Advanced Lithography X-ray Stepper designed as a production tool for high throughput in the sub-quarter-micron device range has been installed and is being commissioned at the University of Wisconsin's Center for X-ray Lithography (CXrL). Illumination for the stepper is provided by a scanning beamline designed and constructed at CXrL. The beamline optical components are a gold-coated plane mirror, a 1-micron-thick silicon carbide window, and a 25-micron-thick beryllium exit window. Beamline features include synchronized scanning of the mirror and exit window, variable scan velocity to compensate for reflectivity changes as a function of incident angle, and a horizontal oscillation of the beryllium window during vertical scanning to average the effects of nonuniform beryllium window transmission. A helium purged snout transports the x-rays from the beamline exit window, to the exposure plane in the stepper. This snout is retractable to allow for the loading and unloading of masks into the stepper. The motions of the mirror, exit window, and snout are computer controlled by a LABVIEW program that communicates with the stepper control software. The design of the beamline and initial operating experiences with the beamline and stepper will be discussed. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 2
    Electronic Resource
    Electronic Resource
    s.l. : American Chemical Society
    Analytical chemistry 38 (1966), S. 1702-1709 
    ISSN: 1520-6882
    Source: ACS Legacy Archives
    Topics: Chemistry and Pharmacology
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Fluids 14 (2002), S. 3009-3017 
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Laminar mixing in the two-dimensional time-periodic Stokes flows between eccentric cylinders [journal bearing flow (JBF)] is studied using the extended mapping method [Galaktionov et al., Int. J. Multiphase Flows 28, 497 (2002)] with the emphasis on the material stretching, e.g., the interface generation abilities, of the flow. With this flexible and computational advantageous method both, the macroscopic material transport and the evolution of the microstructure can be described. It enables a convenient way for studying the material stretching in the flow and moreover, it provides spatial distribution of locally averaged stretching values instead of pointwise statistics, which was typical for previous studies [Liu et al., AIChE J. 40, 1273 (1994); Muzzio et al., Phys. Fluids A 3, 822 (1991)]. The results clearly indicate how the total amount of stretching generated by the flow depends on the parameters of the flow protocol, and that this is not just proportional to the work done on the system, as was suggested earlier in Muzzio et al., Phys. Fluids A 3, 822 (1991). It was found that when self-similar patterns are established, distinctive zones in the flow, which we call "microstructural demixing zones," are observed, where interfaces are contracted during a typical period of the mixing process. Spatial nonuniformity of stretching in chaotic flows calls for additional mixing measures that reflect the nonuniformity of self-similar stretching patterns, created by time-periodic mixing flows. © 2002 American Institute of Physics.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Fluids 12 (2000), S. 469-471 
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Symmetry concepts are applied to analyze three-dimensional time-periodic mixing Stokes flows in a cubic domain. Usage of simple map algebra, developed by Franjione et al. [Phys. Fluids A 11, 1772–1783 (1989); Philos. Trans. R. Soc. London, Ser. A 338, 301–323 (1992)], allows us to reveal the symmetry in the arrangement of periodic points in such a flow. Symmetries reveal essential features of the underlying physics, and with manipulation of symmetries mixing protocols can be made efficient over the entire flow domain. © 2000 American Institute of Physics.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...