ISSN:
1089-7550
Quelle:
AIP Digital Archive
Thema:
Physik
Notizen:
Kinetics and electrical properties of solid-phase epitaxial regrown (SPEG) layers of Sb-implanted strained Si1−xGex alloys are reported. Two sets of Si1−xGex epilayers with compositions of x=0.08 and 0.18, molecular beam epitaxy grown on Si(100) substrates, were implanted at room temperature with Sb+ ions at an energy of 200 and 100 keV, respectively, and doses of 1014 and 1015 ions/cm2. A set of Si(100) samples was also implanted as a reference. The samples were annealed at temperatures of 525, 550, and 575 °C for durations between 5 s and 10 min. For the higher-dose Sb-implanted Si0.92Ge0.08 layer (1015 cm−2) ion backscattering measurements in the channeling mode show a decrease in the regrowth rate compared to Sb-implanted Si(100). The activation energy of the SPEG process for the Si0.92Ge0.08 alloy was 2.9±0.2 eV, higher than the value of 2.4±0.2 eV obtained for pure Si. For the alloy with 18% Ge the SPEG rate for the 1015 cm−2 dose was much smaller compared to the sample with 8% Ge. For the lower-dose implantation (1014 cm−2) the regrowth rates for Si0.92Ge0.08 and pure Si were very close, and the activation energies were 2.8±0.2 and 2.7±0.2, respectively. It was also found that the SPEG rate in a rapid thermal annealing was significantly higher than that for a sample heated in a conventional furnace.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.356013
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