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  • 1
    Electronic Resource
    Electronic Resource
    High resolution imaging of electronic devices via x-ray diffraction topography (1996)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 488-490 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Measurements are reported for x-ray diffraction topography (XRDT) images of implantation and superstructure details in an integrated circuit device investigated with the reflection method of line modified-asymmetric crystal topography (LM-ACT). The x-ray penetration depth and the micron grain size of thin-film nuclear emulsions used to record the diffraction images are shown to limit spatial resolution in the x-ray topographs. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.117762
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Interband transitions in molecular-beam-epitaxial AlxGa1−xAs/GaAs (1985)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 58 (1985), S. 495-498 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Interband transition energies for AlxGa1−xAs layers grown by molecular-beam epitaxy (MBE) techniques have been determined using the electrolyte electroreflectance (EER) technique. The observed data fit quadratic relations for E0, E0+Δ0, E1 and E1+Δ1 to describe variations of energy with composition. Although the x values were not accurately known, the internal consistency of the data is excellent. Given a single bowing parameter we show that accurate values of x can be determined. The EER technique can provide x values with an accuracy better than 0.02 and information on changes in x as small as 0.002. It is thus ideally suited for studying MBE materials.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.335652
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    Paper (German National Licenses)
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