ISSN:
1573-9228
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Abstract The sequence of structural-phase changes in the surface layer of molybdenum during pulsed implantation of N+, C+, and Si+ ions has been studied. At radiation doses ≲5·1016 cm−2 we detected qualitatively similar structural-phase transformations with the formation of highly dispersed secondary-phase particles (nitrides, carbides, and silicides), dislocations, point defects, and clusters of defects. At radiation doses (1–2)·1017 cm−2 implantation of C+ and Si+ ions causes amorphization of the surface layer; nitrogen implantation is accompanied by the formation of continuous layers of the nitride phase on the surface.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00559054
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