Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
70 (1991), S. 4383-4391
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The critical parameters in the single-target magnetron sputtering of YBa2Cu3O7 have been identified and sufficiently optimized to allow the reproducible deposition of films with Tc's of (approximately-greater-than)90 K and Jc's of (very-much-greater-than) 106 A/cm2 at 77 K. It was found that during film growth the bombardment of the YBa2Cu3O7 by energetic particles must be minimized and also a stronger oxidizing agent than molecular oxygen must be present to obtain films with these properties. Otherwise, films are deposited that, by x-ray diffraction and energy dispersive x-ray spectroscopy analyses, are indistinguishable from the highest-Tc 1:2:3 stoichiometric material but which have critical temperatures of (very-much-less-than)90 K. Films need not have 1:2:3 overall stoichiometry to have optimum superconducting properties. In such cases the excess elements are present as second-phase particles.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.349120
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