ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
An automatic measuring system used to measure the microregion magnetic field distribution by means of a SEM has been built. The physical principle is to use the interaction of Lorentz force between electron beam and sample magnetic fields to test the magnetic field. A precisely focused electron beam resulting from a SEM with 5000–20 000-V accelerating voltage is used as the magnetic field detector. The image collection system is formed of PCP (photocon plate), camera, and a high-speed image processing interface. By using a scanning control interface, the selected-area, adjustable step-length electron beam scanning can be completed. The spatial resolution of this measuring system is better than 0.1 μm. The magnetic field sensitivity for measuring VHS mode video magnetic head is about 20 Oe. Using a soft magnetic ring with a little gap, we calibrate the measuring system and the error is 〈10%. The lower cost of this system makes it very practical.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.348139
Permalink