Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
76 (1994), S. 810-814
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Theoretical simulations of x-ray double-crystal-diffraction rocking curves for strain-relaxed superlattices have been successfully carried out based on x-ray dynamical diffraction theory. The strain relaxation, the misorientation between the superlattice layers and the substrate, and the effect of peak broadening due to the formation of misfit dislocations have been taken into account. The influence of possible strain relaxation mechanisms and relaxation ratios on the rocking curves have been investigated. It was found that both the mechanism and degree of the strain relaxation of the superlattice can be determined by fitting the angular positions and the relative intensities of the experimental superlattice satellites. By using this method, an InxGa1−xAs/GaAs superlattice sample and a GexSi1−x/Si superlattice sample were analyzed. The different strain-relaxation mechanisms were found in these two samples.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.357754
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