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  • 1
    Electronic Resource
    Electronic Resource
    Langmuir–Blodgett film passivation of unpinned n-type gallium arsenide surfaces (1988)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 52 (1988), S. 206-208 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: This letter reports the results of the passivation of photochemically unpinned GaAs surfaces using Langmuir–Blodgett (LB) films. Metal-insulator-semiconductor structures are fabricated with LB films as the insulator. The high-frequency capacitance versus voltage measurements show an order of magnitude decrease in the interface trap density (1011 cm−2 eV−1) as compared to the GaAs/anodic oxide interface. The hysteresis in the capacitance versus voltage curves was reduced from a 3-V shift in the flatband voltage, to about a 1-V shift, a level which has been seen in Si/LB film metal-insulator-semiconductor structures. Passivation with LB films is of interest because of their interesting electrical, chemical, and optical properties that can be used in GaAs-based devices.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.99520
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Characterization of gear pumps fabricated by LIGA (1998)
    Springer
    Microsystem technologies 4 (1998), S. 163-167 
    Details
    ISSN: 1432-1858
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Technology
    Notes: Abstract  This paper presents the characterization of a positive displacement, magnetically-coupled, self-priming gear pump and a direct drive metal gear pump. In the magnetically coupled design (the in-line pump), the gears are indirectly driven by a electric motor coupled to a pair of magnets. The pump provides a flow rate of 350 μl/min at 5000 rpm, over 140 cm-H2O (∼2 psi) of head pressure and 28.8 cm-H2O vacuum on the suction side for a single stage pump. A two stage in-line pump generated 53 cm-H2O vacuum at its inelt (21″H2O). Very recently, we demonstrated a direct driven gear pump using a 3 mm smoovyTM brushless DC motor. The direct driven pump provides a maximum flow rate of 2.5ml/min at 1200 Hz (72 krpm) and 3.6 psi dead head pressure. The direct drive pump provided 18 cm-H2O vacuum at its inlet due to the large clearances in the first generation device.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s005420050122
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    Low Z substrates for cost effective high-energy, stacked exposures (1997)
    Springer
    Microsystem technologies 4 (1997), S. 17-20 
    Details
    ISSN: 1432-1858
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Technology
    Notes: Abstract  Commercial application of the “direct” LIGA process requires solving two critical issues: throughput and price. Stacking of PMMA sheets bonded to substrates and exposed simultaneously with hard X-ray has been suggested recently. This paper presents a comparison of potential low Z substrates for stacked exposures in deep X-ray lithography based on elements of the second row of the periodic table. The transmission of various substrates considered for such an application have been calculated and experimentally determined. The transmission properties of materias such a beryllium, carbon, boron and compounds are by far better than that of silicon at lower photon energies typically used in LIGA applications, but this gain decreases with increasing photon energy. In stacked exposures, however, even small gains provide significant decrease in exposure time.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s005420050084
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    Paper (German National Licenses)
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