ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
For damping residual, unsteady flows in semiconductor melts a space-compatible multizone furnace including a magnetic damping array consisting of two radially magnetized permanent magnet rings has been developed. The performance of the whole system has been verified by measuring the temperature fluctuations caused by the time-dependent thermal convection in a Ga melt at 850 °C. By applying a static magnetic induction of 186 mT the fluctuations could be reduced from about 1.5 °C to less than 0.02 °C. For these high precision measurements optical fiber sensors have been used to measure the temperature in the Ga melt and to control the multizone furnace as well. A temperature constancy of ΔT≤0.03 °C in the melt could be established over a period of 16 h. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1146955
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