ISSN:
1432-1130
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract Micro-Raman spectroscopy measurements in a cross-sectional sample geometry were performed for three heterosystems (3C-SiC/Si(100), diamond/Si(100), and ZnSxSe1-x/GaAs(100)). Using an automated xy-stage with a minimum step width of 100 nm one-dimensional scans across the interface were taken. It is demonstrated that sufficient sensitivity for the detection of ultra-thin layers with thicknesses in the nanometer range can be achieved. Thus surface and interface layers not accessible in a plane-view geometry can be identified. In addition, the depth-resolved variation of sample properties like interfacial reactions, stress, and stoichiometry will be discussed.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s002160050339
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