ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
High quality Al0.15Ga0.85N/GaN heterostructures have been fabricated on 6H–SiC and sapphire substrates by metalorganic vapor phase epitaxy (MOVPE). A temperature independent mobility, indicative of the presence of a two-dimensional electron gas (2DEG), was observed in all samples below 80 K. The highest low temperature 2DEG mobility, 7500 cm2/V s, was measured in AlGaN/GaN grown on 6H–SiC; the sheet carrier density was 6×1012 cm−2. Strong, well resolved, Shubnikov–de Haas oscillations were observed in fields as low as 3 T and persisted to temperatures as high as 15 K. Hall effect measurements also revealed the presence of well-defined plateaus in the Hall resistance. The high quality 2DEG properties of the AlGaN/GaN heterostructures grown on 6H–SiC are attributed to the absence of significant parallel conduction paths in the material. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.117096
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