Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
70 (1991), S. 7132-7136
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A cyclic process of diamond deposition was investigated using a detailed surface kinetic model. The process modeled in this study was comprised of two alternating steps: a growth period in a methane-helium mixture, and an etching period in a hydrogen-oxygen-helium mixture. The model included a detailed description of gas-surface reactions in terms of elementary chemical steps. Experimental data available in the literature were simulated first and a fair agreement was obtained between the model and experiment. The model was then subjected to an analysis by varying the time periods of the cycle. The computational results predict a significant increase in the average growth rate of diamond films containing low sp2 carbon component for shorter total cycles, and longer the growth period of the cycle.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.349796
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