Library

X
feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Electronic Resource
    Electronic Resource
    Numerical modeling of a compact ECR ion source : Proceedings of the fourth International Conference on Ion Sources (1992)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 2535-2537 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A compact ECR ion/plasma source is numerically modeled using a Monte Carlo particle method coupled with a solution of the Maxwell equations. The source modeled is a small, coaxial cavity source that utilizes rare earth permanent magnets to create electron cyclotron resonance (ECR) zones in the cavity. The model includes the calculation of the static magnetic field produced by the permanent magnets, the microwave fields at 2.45 GHz, the electron spatial and energy distributions, and the ion spatial and energy distributions. The numerical model is a 2d3v model that assumes an axial symmetry. The electric fields and time-varying magnetic fields are solved using a time-domain finite-difference solution of the Maxwell equations. The electron and ion behaviors are modeled by using the Monte Carlo particle technique, where each particle moves subject to the Lorentz force equation and to the appropriate elastic and inelastic collision processes. The solution obtained is a self-consistent solution where the Maxwell equations are solved iteratively with the particle technique until a steady state condition is reached. Sample simulation results are presented including a spatial electron heating distribution.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1142880
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 2
    Electronic Resource
    Electronic Resource
    Modeling the electron heating in a compact electron cyclotron resonance ion source : Proceedings of the 6th international conference on ion sources (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 921-923 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: An electromagnetic particle-in-cell (PIC) model and a guiding-center particle model are developed and used to model a compact electron cyclotron resonance (ECR) plasma source. The finite-difference time-domain technique is used to model the microwave fields which excite the plasma at 2.45 GHz. The PIC technique is used to model the dynamics of the electrons in the plasma. The electromagnetic fields and the plasma dynamics are solved in a self-consistent manner. The ECR heated electrons are confined to magnetic field lines and subsequently make multiple passes through ECR regions experiencing both increases and decreases in energy. The distribution function of these energy changes is determined from the electromagnetic PIC model and used in a guiding-center particle model. The longer time scale collisional phenomenon in the plasma is modeled using this guiding-center particle model. A compact ECR plasma source used for the generation of ions for materials processing is simulated. This source has a plasma size of 3.6 cm in diameter and 3 cm in height. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1146772
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 3
    Electronic Resource
    Electronic Resource
    Modeling the electromagnetic excitation of a compact ECR ion/free radical source (abstract)a) : Proceedings of 5th international conference on ion sources (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1312-1312 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The electromagnetic excitation of a discharge inside a microwave plasma source has been numerically modeled in the time domain. The source is a cylindrical, single-mode microwave-excited cavity. The time-varying electromagnetic fields inside the resonant cavity, both inside and outside the discharge region, are obtained by applying a finite-difference time-domain method to solve Maxwell's equations. The electromagnetic properties of the discharge load are described using a conductivity model. The spatial electric field patterns, natural frequencies, stored energy, and quality factor of a plasma-loaded, microwave-resonant cavity are simulated. Additionally, the simulated results for a simplified plasma source structure are compared to a known analytical solution to verify the simulation technique.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144993
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
  • 4
    Electronic Resource
    Electronic Resource
    Modeling the electromagnetic excitation of a compact ECR ion/free radical sourcea) (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1761-1765 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The electromagnetic excitation of a discharge inside a microwave plasma source has been numerically modeled in the time domain. The source is a cylindrical, single-mode microwave-excited cavity. The time-varying electromagnetic fields inside the resonant cavity, both inside and outside the discharge region, are obtained by applying a finite-difference time-domain method to solve Maxwell's equations. The electromagnetic properties of the discharge load are described using a conductivity model. The spatial electric field patterns, natural frequencies, stored energy, and quality factor of a plasma-loaded, microwave-resonant cavity are simulated. Additionally, the simulated results for a simplified plasma source structure are compared to a known analytical solution to verify the simulation technique.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144874
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
    Paper (German National Licenses)
    Fulltext
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...