Electronic Resource
PO Box 1354, 9600 Garsington Road, Oxford OX4 2XG, UK.
:
Blackwell Science Ltd
Fatigue & fracture of engineering materials & structures
28 (2005), S. 0
ISSN:
1460-2695
Source:
Blackwell Publishing Journal Backfiles 1879-2005
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2–3 GPa.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1111/j.1460-2695.2005.00873.x
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