ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A tabletop high-brightness line-emitting laser-plasma soft x-ray source utilizing single microscopic droplets as target is shown to produce several orders of magnitude less debris than conventional-target sources. Quantitative measurements of debris deposition rates and x-ray flux at different directions around the droplet plasma are presented. With ethanol droplets and a 10 Hz, 70 mJ/pulse laser, typically ∼1×1012 photons/(sr⋅pulse⋅line) are emitted from the C V and C VI lines in the water window. The debris deposition is further reduced with a small, localized gas jet shield, which is transparent to the x-rays. The deposition rate through the gas shield has been determined to be ∼0.2 pg/(sr⋅pulse). Thus, this droplet-target laser-plasma x-ray source is four orders-of-magnitude cleaner than a low-debris plastic tape target laser plasma of similar brightness, making it useful for x-ray microscopy and lithography. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1146174
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