ISSN:
1618-2650
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Summary Different O-rings are investigated with respect to their application with high purity electronic chemicals. Hydrochloric acid, nitric acid, sulfuric acid and ammonia solution were used in leaching tests. The analytical results show that the deterioration levels are chemical specific and vary strongly between the different O-rings. O-rings made from perfluoro elastomers are relatively free from contamination.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00633552
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