ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
For the investigation of high aspect ratio structures with Atomic Force Microscope (AFM),the cantilevers with very sharp and long tips are useful. Electron beam induced deposited(EBID) tipscan be simply fabricated by aligning the electron beam directly down the vertical axis of Si cantileverand then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere ofresidual gases generated by the oil of the diffusion pump of the Scanning Electron Microscope(SEM). However, the EBID tips cannot grow over 1&m in the residual gas atmosphere since there is alittle carbon source. We could enhance the height of tips by dipping the cantilever into the organicsolvents, drying it in the vacuum chamber and irradiating electron beam on it. With this process, wecould acquire the tip whose base diameter is 180nm and effective length is 3.18&m. In addition, weobserved that the growth behaviors of the tips are different in accordance with the species of thesolvents and we will discuss the effects of the organic solvents on the growth of the tips
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/15/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.544-545.757.pdf
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