ISSN:
1573-2711
Keywords:
spreading
;
surface diffusion
;
thin films
;
activation energy
;
monodisperse perfluoropolyalkylether
;
scanning microellipsometry
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Surface diffusion of perfluoropolyalkylether (PFPE) Fomblin Z15 and Fomblin Zdol (hydroxyl terminated PFPE) on silicon wafers was investigated over the temperature range of 25 to 50°C using scanning microellipsometry. Zdol exhibits a much lower mobility and a distinctly different thickness profile as compared to Z15. The activation energy for surface diffusion of Zdol is higher than that of Z15, reflecting the stronger affinity of its hydroxyl end groups for the substrate. The viscosity flow activation energy E η * is compared with that of surface diffusion E d * yielding E d * ≈ E η * for Z15, and E d * ≈ 1.5E η * for Z
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00209776
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