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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 92 (2002), S. 1099-1105 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The TiN(5 nm)/Al/TiN (5 nm) structure is fabricated by sequential sputtering for the diffusion barrier application against Cu diffusion. Al is used as an interlayer with an expectation that it will favor stuffing of TiN grain boundaries by reacting with O2 in the structure. In one phase of experiments, the upper TiN layer is exposed to air and preannealed in N2/O2 ambient for better stuffing. In another phase, the preannealing is not performed for the sake of reducing process steps. The Al layer thickness is varied to find out the optimized value. The diffusion barrier performance is investigated by x-ray diffraction, sheet resistance measurement, secco etching and cross sectional transmission electron microscopy after stressing the structure in temperature range of 350–700 °C at vacuum for 30 min. It is found that the barrier property is improved remarkably with the introduction of an Al layer between two TiN layers as compared to that of a single TiN layer with the same thickness. The results indicate that the barrier performance is enhanced proportionally with increasing Al thickness (from 0.5 to 2 nm) in the case that upper TiN is preannealed, showing the best result for 2 nm thick Al interlayer. On the other hand, in not preannealed upper TiN, barrier property is at its best when Al thickness is 1 nm but above this value the barrier performance deteriorates drastically. © 2002 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 70 (1999), S. 2546-2550 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A new type of rotary motor by inchworm motion using two belts is developed. A rotor is wrapped by two opposite belts which are connected to piezoelectric actuators. A serial lever structure with flexure hinges is used to connect a belt and piezoelectric actuators. The lever structure amplifies micro displacement of a piezoelectric actuator. A rotational motion with the step size of 2.36 μrad is obtained through this work. An angular step size can be further reduced by increasing the rotor radius. We present a analysis model of the motor for a design of a similar precise motor. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 79 (2001), S. 2549-2551 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A laterally segregated diffusion barrier was investigated for Cu metallization. In this scheme, the intended final structure is composed of two different barrier materials; one is the parent barrier layer (TiN, in our case) and the other (Al2O3, in this case) is segregated laterally along the grain boundaries of the parent barrier layer. As a result, the fast diffusion paths, the so-called grain boundaries of the parent diffusion barrier, are effectively passivated. To realize this type of barrier experimentally, the TiN(5 nm)/Al(2 nm)/TiN(5 nm) structure was fabricated by sequential sputtering and compared with TiN(10 nm) as a diffusion barrier against Cu. The etch pit test results indicated that the barrier with the Al interlayer prevented Cu diffusion into the Si up to 650 °C, which is 250 °C higher than achieved by a TiN(10 nm) barrier. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    s.l. : American Chemical Society
    Journal of agricultural and food chemistry 33 (1985), S. 17-19 
    ISSN: 1520-5118
    Source: ACS Legacy Archives
    Topics: Agriculture, Forestry, Horticulture, Fishery, Domestic Science, Nutrition , Process Engineering, Biotechnology, Nutrition Technology
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 72 (2001), S. 3435-3439 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: This article presents a new design of a magnetic system which can be used as a position sensing system for precision measurements. The proposed system consists of driving coils, position-detecting coils, movable cores, and magnetic blocks. The cores are put into the position-detecting coils to draw the flux. As the cores move in a motion proportional to the input position, induced voltages arise in the position-detecting coils. The turns ratio and the air-gap dimensions between the magnetic blocks and the movable cores are selected in such a way as to have high sensitivity. To decrease the flux loss and produce the strong flux density, a symmetric and closed loop form is adopted. The elements that affect the system characteristics and sensitivity are turns ratio, air-gap dimension, capacitance effect, excitation frequency, and so forth. The sensitivity of the newly designed system is greater than 2000 mV/(V mm) and the linearity error is below ±0.10% in the range of ±200 μm. The repeatability standard deviation in this system is below 50 nm. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 72 (2001), S. 3731-3733 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Precision actuators, such as pick-up actuators for HDDs or CD-ROMs, mostly show multidimensional motion. So, to evaluate them more completely, multidimensional measurement is required. Through structural variation and optimization of the design index, the performance of a measurement system can be improved to satisfy the requirement of this application, and so the resolution of each axis is higher than 0.1 μm for translation and 0.5 arcsec for rotation. Using this measurement system, the multidimensional motion and frequency transfer functions of a bimorph-type piezoelectric actuator are obtained. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 7
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 72 (2001), S. 2822-2826 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Optical triangulation displacement sensors are widely used in many applications due to the advantages of noncontact measurement, simple structure, good resolution, and long operating range. However, they commonly have several errors, such as speckle effects and electronic noises, etc. Among them, reducing electronic noises is very tedious and hard. To reduce the effect of electronic noises, conventional systems use sequential averaging techniques. Since electronic noises are random in nature, their variances can be reduced with an averaging operation. However, the averaging is inherently a time-consuming process which requires many measurements. To reduce the time for averaging and the number of measurements, several sensor modules or faster signal processing hardware are required. Therefore, these alternatives are not cost effective and increase the size of the measurement system. In this article, we propose a simple and cost-effective system structure for optical triangulation displacement sensors, which reduces time for averaging and the number of measurements by using a transmission-type diffraction grating. The diffraction grating helps us to obtain several signals simultaneously. Therefore, it is achievable to reduce time for averaging and the number of measurements. The feasibility of the proposed system was verified through experiments. When only two diffracted orders are used for obtaining signals, the rms of noise is reduced by 1/(square root of 2). © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 8
    ISSN: 1546-170X
    Source: Nature Archives 1869 - 2009
    Topics: Biology , Medicine
    Notes: [Auszug] Here we report the presence of hyperphagia, obesity and insulin resistance in knockout mice deficient in IL-18 or IL-18 receptor, and in mice transgenic for expression of IL-18 binding protein. Obesity of Il18−/− mice resulted from accumulation of fat tissue based on increased food ...
    Type of Medium: Electronic Resource
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  • 9
    ISSN: 1745-4514
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Process Engineering, Biotechnology, Nutrition Technology
    Notes: A new enzymatic treatment procedure was devised to recover and further utilize fish bones from processing which are normally discarded. This procedure includes the use of an enzyme preparation isolated from raw mackerel intestine by acetone precipitation. The caseinolytic activity of mackerel intestine crude enzyme (MICE) was approximately 0.58 U/mg protein, which was comparable to those of trypsin and α-chymotrypsin, or even higher than those of papain and Aspergillus saitoi protease. The optimum pH, temperature and enzyme/substrate ratio of MICE for hydrolysis of protein with hoki (Johnius belengeri) frames were determined to be pH 9.0, 40C and 1:100 (w/w). When the hoki frame was treated by MICE for 6 h under the optimum reaction conditions, the yield of bone recovery was approximately 90%. Compared to Alcalase, trypsin, α-chymotrypsin and Neutrase, the yield of bone recovery using MICE was higher. These results suggest that MICE may be utilized for bone recovery from fish frame.
    Type of Medium: Electronic Resource
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  • 10
    Electronic Resource
    Electronic Resource
    Springer
    Telecommunication systems 14 (2000), S. 95-106 
    ISSN: 1572-9451
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology
    Notes: Abstract We consider the channel allocation problem, which is one of the most interesting problems in mobile radio systems. This problem is known to be NP‐complete and a couple of heuristic algorithms have been developed. In this paper, we convert the problem into a simpler form through the concept of pattern, a set of cochannel cells. We suggest another algorithm based on simulated annealing for this simplified problem. The algorithm is applied into different benchmark problems that have appeared in the literature. The presented examples illustrate that our method works very well. Computational results using our formulation and simulated annealing algorithm are reported.
    Type of Medium: Electronic Resource
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