ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Chemical analysis has been made of 361-A(ring) thermal oxide films nitrided in ammonia and also subsequently reoxidized in oxygen at 1000 °C, using techniques of ellipsometry and infrared spectrometry. The nitrided film is shown to have a three-layer structure consisting of 22 A(ring) of 48% nitrogen, 334 A(ring) of 17% nitrogen, and 7.4 A(ring) of 100% nitrogen, where the fractions refer to % N/(N+O). After oxidation, the interface layer was unchanged and the surface merged into the bulk, the nitrogen content of which was reduced to 11%. The void content has also been determined.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.336196
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