ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The decomposition characteristics of CF4 with Argon or oxygen in 2.45GHz microwavehas been investigated by using a Langmuir probe with variation of the microwave power and chamberpressure. For CF4/Ar and CF4/O2/Ar discharges, the ion density and the electron density decrease withincreasing microwave power. The electron temperature was decreased by reducing the mean free pathof electrons with increasing microwave power. Also with increasing pressure, the electrontemperature increase, and ion and electron density decrease by increase of inelastic collisionfrequency and of collision with the walls in the chamber. The electron temperature is 13.6 ~ 5.9 [eV],the electron density is 4.4×1010 ~ 2.2×1010 [cm-3] and ion density is 5.2×1011 ~ 4×1010 [cm-3].According as add oxygen, ion and electron density increased relatively comparing to CF4/Ardischarge. The electron temperature is 8.5 ~ 6.2 [eV], the electron and ion density is 5.1×1010 ~2.1×1010 [cm-3] and 3.7×1011 ~ 7.3×1010 [cm-3], respectively
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/15/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.544-545.701.pdf
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