ISSN:
0142-2421
Keywords:
carbon nitride films
;
inductively-coupled plasma deposition
;
adamantane
;
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The films addressed here were grown using adamantane (C10H16) vapour in flowing argon/nitrogen mixtures in an inductively-coupled plasma processing (ICP) vacuum rig. The films were characterized by XPS, AES, infrared spectroscopy (Fourier transform infrared (FTIR) in transmission) and atomic force microscopy. The x-ray photoelectron data showed typically high nitrogen contents, and deconvolution of the observed C 1s band confirmed the presence of the chemical states identified by FTIR. Further XPS-quantified data established the changes observed in the relative carbon and nitrogen concentrations as a function of deposition regime.Evidence of a structural transformation in the films over time was established from the FTIR spectra, which exhibited significant changes in the relative intensities of the C≡N, C=N/C=C, NH and CH bands identified attendant on the deposition parameters.Analysis by AES revealed additionally an increasing carbon/nitrogen ratio, suggesting the transformation of sp3 to sp3 carbon was taking place in the film, with some nitrogen lost from the films during data acquisition. These data indicated clearly that the electron beam-stimulating production of the Auger spectra contributed to the transformation of the chemical states present initially.Finally, atomic force microscopy of the surfaces showed that the surface morphology of the film changes during Auger analysis. © 1998 John Wiley & Sons, Ltd.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
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