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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 62 (1987), S. 682-688 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A single-element rotating-polarizer ellipsometer (psi-meter) was used for in situ characterization of the thermodynamic and kinetic behavior of poly-(methyl methacrylate), PMMA, thin films (1.2 μm) in solvent/nonsolvent binary mixtures of methyl ethyl ketone/isopropanol (MEK/IPA) and methyl isobutyl ketone/methanol (MIBK/MeOH). Thermodynamic effects were inferred from equilibrium behavior by the degree of swelling and polymer-solvent solubility. A sharp transition between complete solubility and almost total insolubility was observed in a narrow concentration range near 50:50 (by volume) solvent/nonsolvent for both MEK/IPA and MIBK/MeOH. In the insoluble regime, the polymer was found to swell up to three times the initial thickness. At 50:50 MEK/IPA, a temperature decrease from 24.8 to 18.4 °C caused a change from complete dissolution to combined swelling/dissolution behavior and rendered the PMMA film only 68% soluble. Kinetic effects were determined by dissolution and penetration rate measurements. A constant penetration velocity was observed for almost all compositions for both binary solvent mixtures with Case II transport assumptions providing good agreement with experimental results. For MEK/IPA, penetration rates increased with increasing MEK concentration. For MIBK/MeOH, however, a maximum was observed at 60:40 MIBK/MeOH.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 32 (1986), S. 798-808 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: A centrifugal method for fractionating fine (〈10 μm) particles by size and/or density is described. Periodic, bidirectional flow through a continuously spinning coiled tube splits fine particle suspensions into two fractions. Proof-of-principle experiments with zeolite powder have demonstrated successful concentration of aqueous dispersions.
    Additional Material: 13 Ill.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    New York, NY [u.a.] : Wiley-Blackwell
    Journal of Applied Polymer Science 38 (1989), S. 859-885 
    ISSN: 0021-8995
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Fundamental models have been developed to describe swelling and dissolution of glassy polymer thin films. The models account for solvent penetration by either Fickian or Case II diffusion mechanims. The convective flux due to local swelling as the solvent penetrates is included. Chain disentanglement at the polymer-developer solution interface is scaled with the local solvent concentration and polymer molecular weight using reptation theory. The effective surface concentration during dissolution is estimated by applying thermodynamics of swollen networks to the entangled polymer. Swelling and dissolution of thin polymer films have direct application to microlithography. Various molecular and processing parameters affect the outcome of resist development. The utility of the models for selecting appropriate developer solvents, minimizing resist swelling, and providing a better understanding of the swelling and dissolution of resists is demonstrated.
    Additional Material: 11 Ill.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    New York, NY [u.a.] : Wiley-Blackwell
    Journal of Applied Polymer Science 39 (1990), S. 803-823 
    ISSN: 0021-8995
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: The effects of solvent size, temperature, and polymer molecular weight on the swelling of poly(methyl methacrylate) (PMMA) thin films in low molecular weight alcohols were investigated using an in situ ellipsometer. Apparent activation energies were indicative of non-Fickian diffusion, although optical data showed substantial Fickian character for swelling in methanol and moderate Fickian character in ethanol. Penetration rates were strongly dependent on the solvent molar volume for methanol, ethanol, and isopropanol, but 1-butanol and 2-pentanol had rates similar to isopropanol. The effective cross sections of these longer molecules are similar to isopropanol, and this apparently explains the similar penetration rates. The effect of polymer molecular weight (MW) on methanol penetration rates (21-27°C) was investigated with monodisperse PMMA (Mn = 6.4-40.0 × 104 g/mol). A minimum at intermediate MW was observed. Isopropanol swelling rates (45-52°C) were insensitive to MW. The swelling data were also used to determine parameters for transport models that describe the swelling of thin polymer films.
    Additional Material: 11 Ill.
    Type of Medium: Electronic Resource
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