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  • 1
    Electronic Resource
    Electronic Resource
    Springer
    Journal of materials science 19 (1984), S. 2211-2218 
    ISSN: 1573-4803
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Abstract The preparation of indium phosphide by reactions between separate indium chlorides and phosphine is described. It is shown that the indium monochloride-phosphine reaction is the most favourable of the three possible reactions. It is demonstrated that various growth rates are possible over a range of temperatures, that good morphological layers can be obtained along with reasonable electrical characteristics. Explanations are advanced for the chemical process and the limitations on layer properties encountered.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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  • 2
    Electronic Resource
    Electronic Resource
    Springer
    Journal of materials science 16 (1981), S. 1013-1022 
    ISSN: 1573-4803
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Abstract The results of a study of the preparation of epitaxial layers of indium phosphide on indium phosphide substrates by means of the PCl3-In-InP process are presented. The limitations of the process as discovered in this study are described. It is proposed that the major reaction species is phosphine and the unpredictable break-down of this compound, along with the presence of oxyhalides in the phosphorus trihalides, are the significant causes of the observed variation of the parameters of the epitaxial layers.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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