Digitale Medien
s.l. ; Stafa-Zurich, Switzerland
Key engineering materials
Vol. 321-323 (Oct. 2006), p. 99-102
ISSN:
1013-9826
Quelle:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Thema:
Maschinenbau
Notizen:
The profile of the mirror surface is measured by using optical phase shift method andTwymann-Green interferometer. Phase map is calculated by applying 4–buckets method andVikhagen phase shift algorithm is applied to escape convolution errors. From that the obtainedroughness of the mirror surface is around 20 nm rms roughness value. Also, the interferometer wasstabilized by using fringe locking method. Also, we propose two colors method very precise surfaceprofile and the length can be measured in the harsh environmental conditions
Materialart:
Digitale Medien
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/51/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.321-323.99.pdf
Permalink
Bibliothek |
Standort |
Signatur |
Band/Heft/Jahr |
Verfügbarkeit |