ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A high-power radio-frequency plasma source was built and tested for an antenna frequency of 2.45 MHz. A puff valve fed hydrogen gas into a plasma chamber made from 4-in.-diam Pyrex tubing. A helical antenna was wound directly around this chamber. The plasma source was surrounded by a magnetic bucket which used a longitudinal line-cusp geometry. For 20 kW of rf input power, the peak electron density was 2.0×1019 m−3, the electron temperature was 2.0 eV, the ion temperature was 0.9 eV, and the atomic hydrogen density was 4.4×1019 m−3. For 90 kW of rf input power, the peak electron density was 8.9×1019 m−3, the electron temperature was 2.5 eV, the ion temperature was 3.0 eV, and the atomic hydrogen density was 2.3×1019 m−3. The plasma source had a typical current efficiency of 6 A/kW. A theoretical model for the plasma loading resistance was developed.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1139086
Permalink
