ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Using spectroscopic ellipsometry, we measured the pseudodielectric function of Si1−x−yGexCy alloys (0≤x≤0.48,0≤y≤0.05) grown on Si(001) using molecular beam epitaxy. For pseudomorphically strained layers, the energy shifts of the E1, E1+Δ1, E0′, and E2 transitions are determined by line shape analysis and are due to alloy composition effects, as well as hydrostatic and shear strain. We developed expressions for hydrostatic and shear shift from continuum elasticity theory, using deformation potentials for Si and Ge, for biaxial stress parallel to the (001) growth plane in a diamond or zinc blende-type crystal and applied this to the ternary Si–Ge–C alloy. The energies of E1 and its spin-orbit split partner E1+Δ1 agree fairly well with theory. The E2 transitions in Si1−xGex at around 4.3 eV depend linearly on Ge concentration. In case of relaxed layers, the E1 and E1+Δ1 transitions are inhomogeneously broadened due to the influence of misfit and threading dislocations. For a silicon cap on top of a dislocated, relaxed SiGe layer, we recovered the bulk Si dielectric function. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.363827
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