Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
75 (1999), S. 142-144
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Surface acoustic wave (SAW) impedance element filter prototypes operating in the 5 GHz range are designed, fabricated, and characterized. The patterning is carried out using direct-writing electron-beam lithography and the lift-off technique. The periodicity p of the resonators in the filters for the 5 GHz regime is on the order of 400 nm. Despite the nonideal finger profile, a low minimum insertion loss of 6.5 dB and a flat passband are measured. Our results suggest that SAW technology itself presents no fundamental physical limitations for its extension into the 5 GHz range. © 1999 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.124300
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