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  • 1
    Electronic Resource
    Electronic Resource
    On-line coupling of ion chromatography and atomic spectrometry and use of direct graphite furnace atomic absorption spectrometry as new tools for ultra trace determinations in refractory metals (1995)
    Springer
    Microchimica acta 117 (1995), S. 245-260 
    Details
    ISSN: 1436-5073
    Keywords: on-line coupling ; tungsten ; ultra trace analysis ; IC-ICP-MS
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Abstract On-line coupling of inductively coupled plasma (ICP) techniques such as ICP-AES and ICP-MS with ion chromatography (IC) offers unique features for ultra-trace analysis. An on-line preconcentration procedure based on cation exchange enables sub-ng/g analysis in complex matrices like molybdenum and tungsten. The best dissolution reagent for these matrices is hydrogen peroxide, which can be cleaned to ultra high purity with the same metal free chromatography equipment used for the preconcentration. Preconcentration is possible for elements that show cationic reactions within acidic peroxide containing solutions. In this study 28 elements detrimental for microelectronics applications are observed. A comparison of the combinations IC-ICP-AES and IC-ICP-MS with glow discharge mass spectrometry (GDMS) for the analysis of today's purest tungsten samples shows the analytical power and accuracy of the coupled devices. Graphite furnace atomic absorption spectrometry (GFAAS) as an extremely sensitive analytical technique is applied with and without the same sample pretreatment as used for the on-line coupling. Direct GFAAS measurements of alkali metals are complementary to IC-ICP techniques. The data evaluated with these wet chemical techniques are compared to the usual manufacturers characterisation technique GDMS. With respect to the low concentrations present in these high purity materials (ng/g level in the solid) the discrepancies between all methods are acceptable. The sensitivity of IC-ICP-MS is in most cases far superior to IC-ICP-AES and for some elements also to GDMS. Furthermore the specific advantages of on-line coupling such as the elimination of isobaric interferences in ICP-MS or spectral interferences in ICP-AES are shown for ICP-AES and ICP-MS determinations.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01244894
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    A critical comparison of on-line coupling IC-ICP-(AES, MS) with competing analytical methods for ultra trace analysis of microelectronic materials (1999)
    Springer
    Fresenius' journal of analytical chemistry 364 (1999), S. 404-409 
    Details
    ISSN: 1432-1130
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Abstract On-line coupling of ion chromatography and atomic spectrometry (IC-ICP-(AES, MS)) are compared to so-called reference methods and other competing methods for ultra trace characterization of solid microelectronic materials. The comparison is based on analytical data gained for well characterized samples by a number of different laboratories. The matrices used for comparison are Mo, Mo-oxide, MoSix, W, W-oxide, WSix, metallic As, red P and Re. The analyte elements accessible by IC-ICP-(AES, MS) and with reference values for at least one other method are Ag, Al, Ba, Ca, Cd, Cr, Co, Cu, Fe, K, Mg, Mn, Na, Ni, Ti, Tl, Th, U and Zn. The agreement of results of IC-ICP-(AES, MS) with those of isotope dilution mass spectrometry (IDMS) and radiochemical activation analyses (RNAA) shows good accuracy for most elements and some contamination problems with ubiquitous elements. A correlation of IC-ICP-(AES, MS) and GDMS results is undoubtful, but the discrepancies are rather high. As further technique ETV-ICP-MS is compared, whose results are in reasonable agreement with IC-ICP-(AES, MS). Details on some new applications as well as of some new methodological enhancements of on-line coupling IC-ICP(AES, MS) for the matrices As and P were included.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s002160051357
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  • 3
    Electronic Resource
    Electronic Resource
    On-line coupling between chromatography and inductively coupled plasma mass spectrometry — a current assessment (1994)
    Springer
    Fresenius' Zeitschrift für analytische Chemie 350 (1994), S. 210-220 
    Details
    ISSN: 1618-2650
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Abstract The current state of on-line coupling between liquid chromatography and inductively coupled plasma mass spectrometry is reviewed. The applications can be divided into three subgroups by changing the importance of the coupling partners. An overview is given of applications in these subgroups, of its use as preconcentration and matrix elimination techniques, for the elimination of spectral interferences and as a tool for speciation analysis. A discussion of current and future development areas in on-line HPLC-ICP-MS is also included.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00322472
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    Paper (German National Licenses)
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  • 4
    Electronic Resource
    Electronic Resource
    On-line coupling of ion chromatography and atomic spectrometry for ultra trace analysis in high purity molybdenum- and tungsten-silicide (1996)
    Springer
    Fresenius' Zeitschrift für analytische Chemie 354 (1996), S. 788-796 
    Details
    ISSN: 1618-2650
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Abstract The well-established technique of on-line coupling ion chromatography and atomic spectrometry for ultra trace analysis in high purity molybdenum and tungsten is extended to include the silicides MoSix and WSix. An additionally included matrix elimination step allows an almost interference-free trace analysis in the silicide matrices. Reproducibility and accuracy of the on-line method were checked by comparison with several other methods, such as isotope dilution, radiochemical neutron activation analysis, direct determination by atomic absorption analysis and not at least with glow discharge mass spectrometry. The results show the high potential of the on-line method for reaching detection limits in the pg g-1 range, but they show also remaining problems with contamination and system calibration.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s0021663540788
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    Paper (German National Licenses)
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  • 5
    Electronic Resource
    Electronic Resource
    Literaturkarussell. Chemie (1998)
    Weinheim : Wiley-Blackwell
    Chemie in unserer Zeit 32 (1998), S. XII 
    Details
    ISSN: 0009-2851
    Keywords: Chemistry ; Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/ciuz.19980320517
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  • 6
    Electronic Resource
    Electronic Resource
    On-line coupled ion chromatography-ICP-(AES, MS) and electro thermal vaporisation-ICP-MS in use for ultra trace analysis of high purity rhenium (1994)
    Springer
    Fresenius' Zeitschrift für analytische Chemie 348 (1994), S. 510-519 
    Details
    ISSN: 1618-2650
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Abstract This work presents the benefits of coupling techniques such as Electro Thermal Vaporisation (ETV)-ICP-MS and Ion Chromatography (IC)-ICP-(AES, MS) for ultra trace analysis in a high purity rhenium powder sample. Direct analysis using ICP-AES suffers from poor detection limits and allows trace analysis only above 1 μg/g for most analytes. ICP-MS analysis of trace elements is more sensitive, but signal depression caused by the heavy Re-ions limits trace analysis to concentrations of 50–100 ng/g analyte in the solid sample. Coupling Ion Chromatography with ICP-spectrometers, combined with time resolved measurement (IC-ICP-TRM) of the elution signals, was used to enhance the sensitivity of both ICP-AES and ICP-MS. Resulting detection limits are in the very low ng/g to pg/g range. Coupling of ETV and ICP-MS offers the possibility of eliminating the volatile Re2O7 matrix by thermal pretreatment and allows ICP-MS measurements without matrix interferences caused by Re. Results from these methods are compared with Glow Discharge Mass Spectrometry (GDMS) analysis, a semiquantitative solid state technique. The results are also compared with the manufacturers' specifications to show the power of modern routine analysis using ICP-AES or FAAS.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00323921
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