ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A multiple hollow-cathode vacuum-ultraviolet source excited by a pulsed glow discharge in a mixture of Xe and He has been developed. A MgF2 window with a diameter of 55 mm was used, and the repetition frequency was varied between 3 and 9 kHz. Stable output was maintained for about 3 h. Measurements of 147 nm radiant illumination were made at various distances from the window at various repetition frequencies. The peak radiant illumination decreased while the average radiant illumination increased with increasing repetition frequency. The output power density near the center of the window could be estimated from the relationship between measured radiant illumination and distance from the window. The peak and average output power densities at 6 kHz were 30 and 1.5 W/m2, respectively. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1146883
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