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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Fluids 11 (1999), S. 821-832 
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Measurement of the chemical composition of gases sampled through a small hole in the substrate can be a useful diagnostic for investigations of the chemistry of chemical vapor deposition (CVD) processes. Ideally, one would measure the composition of the gas at the growth surface. However, the flow disturbance due to sampling causes the conditions at the mouth of the orifice to be different from those at the growth surface. Unless the orifice diameter is sufficiently small, relative to the thickness of chemical and thermal boundary layers above the growth surface, the sampled composition will differ from the composition at the growth surface. In this work, we present results of two-dimensional simulations of the flow, heat transfer, and chemical reactions in an axisymmetric stagnation point flow with gas sampling through a small orifice in the substrate on the symmetry axis of the flow field. Detailed results are given for atmospheric-pressure radio-frequency plasma CVD of diamond, corresponding to experiments performed in our laboratory. We also present more general results, approximate analytical representations of the flow field, and scaling rules for the size of the disturbance due to the sampling orifice. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    New York, NY : Wiley-Blackwell
    International Journal of Chemical Kinetics 26 (1994), S. 779-799 
    ISSN: 0538-8066
    Keywords: Chemistry ; Physical Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: The use of the pulsed laser powered homogeneous pyrolysis technique for measuring unimolecular decomposition rate constants under unambiguously homogeneous conditions is investigated by numerical simulation of the experiment. The coupled partial differential equations which govern the gas dynamics and chemical kinetics are solved numerically and the results analyzed. Conditions under which rate constants can be extracted from the experimental data using a simplified analysis are determined. The effects of five sources of error in the simplified analysis are computed. A correlation is presented which may be used to correct for overestimation of the rate constant which is inherent in the simple analysis. Conditions under which the other four sources of error become negligible are presented. Overall, it is expected that this technique will be capable of routinely measuring rate constants within a factor of 2, and will do much better when a high power laser with a uniform beam profile is used and/or a well characterized thermal monitor molecule is available which decomposes with kinetic parameters close to that of the reactant being investigated. © 1994 John Wiley & Sons, Inc.
    Additional Material: 12 Ill.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    New York, NY : Wiley-Blackwell
    International Journal of Chemical Kinetics 28 (1996), S. 817-828 
    ISSN: 0538-8066
    Keywords: Chemistry ; Physical Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: Pulsed laser powered homogeneous pyrolysis (LPHP) is a technique which can be used to measure rate parameters for purely homogeneous unimolecular decomposition reactions at high temperatures (600-1500 K). The reaction temperature in pulsed LPHP may be obtained from the speed of sound in the reacting gas, which may be measured by observing the thermal lens effect of the gas on a probe laser beam. The reaction time may be obtained directly from the thermal lens measurements. In this work experiments were performed using ethyl acetate (EtAc) and isopropyl chloride (2-ClPr), two reactants whose unimolecular decomposition rate parameters are well established. This allowed us to assess the accuracy and precision attainable with this technique. Pulsed LPHP proved capable of providing rate parameters in good agreement with those in the literature. The results for which the measured activation energies were closest to the literature values gave the temperature dependence of the rate constants as log(kEtAc) = (12.0 ± 0.9) - 47.7 ± 4.4(kcal/mol)/2.303RT and log(k2-ClPr) = (13.3 ± 1.0) - 50.8 ± 4.8(kcal/mol)/2.303RT. These may be compared with the literature recommendations, log(kEtAc) = 12.6 - 48.0(kcal/mol)/2.303RT and log(k2-ClPr) = 13.6 - 51.1(kcal/mol)/2.303RT. In all cases the measured rate parameters agreed with the recommended values to within the error limits of the measured values. Potential sources of error in the temperature measurement and the kinetic parameters are explored. The expected accuracy of the experiments is assessed, and possible improvements in the experiment are suggested. © 1996 John Wiley & Sons, Inc.
    Additional Material: 7 Ill.
    Type of Medium: Electronic Resource
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