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  • 1
    Electronic Resource
    Electronic Resource
    Molecular composition of films and solid particles polymerized in fluorocarbon plasmas (2001)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 89 (2001), S. 893-899 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In fluorocarbon (C4F8) plasmas, formation mechanisms of polymers were investigated by the characterization with x-ray photoelectron spectroscopy (XPS) and gel permeation chromatography (GPC). The molecular compositions of the polymers in the films deposited on the substrate and in the particles formed in the gas phase were elucidated by these chemical analyses. The XPS results showed that the particles were carbon-rich and composed of highly branched molecules in contrast to the film composition. From the GPC measurements, the particles were found to contain ultrahigh mass polymers, whose molecular weights were around 100 000. On the contrary, the deposited film contained polymers with molecular weights distributed below 2000, in which oligomers, monomers, and fragmented products were included. Present study suggests that these polymers are involved in the formation of crosslinked networks of the films and the particles via surface reactions, where the crosslinking is enhanced by the ion bombardment. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1334636
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  • 2
    Electronic Resource
    Electronic Resource
    Spatiotemporal behaviors of excited Xe atoms in unit discharge cell of ac-type plasma display panel studied by laser spectroscopic microscopy (2000)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 88 (2000), S. 4967-4974 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Two-dimensional spatiotemporal behaviors of excited Xe atoms in the 1s4 resonance state and the 1s5 metastable state were measured in a unit discharge cell of an ac-type plasma display panel by a laser absorption technique combined with an optical microscope. The measured density of Xe(1s5) has two large peaks on both the temporal anode and cathode sides. The peak at the anode has a narrower spatial distribution while the peak at the cathode is distributed over the electrode area. In its temporal behavior, the anode peak rises slightly faster than the peak at the cathode and decays faster at the beginning of afterglow, but both peaks tend to have the same decay rate in the later period. The behavior of Xe(1s4) shows similar features, but the decay rate is much larger, corresponding to the effective lifetime of imprisoned resonance radiation. The maximum densities of Xe(1s5) and Xe(1s4) are 5×1013 and 2×1013 cm−3, respectively. Emission from Xe(2p) atoms was also observed, and this nearly followed the current wave form. With these results, we estimated the efficiency of vacuum ultraviolet emissions from excited Xe(1s4) atoms and Xe2* excimers formed from Xe(1s5) atoms. © 2000 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1314312
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  • 3
    Electronic Resource
    Electronic Resource
    Spatio-temporal measurement of excited Xe(1s4) atoms in a discharge cell of a plasma display panel by laser spectroscopic microscopy (1994)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 65 (1994), S. 935-937 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Dynamic behavior of excited Xe atoms in the 1s4 state was measured in a micro-discharge cell of a color plasma display panel by a laser absorption technique combined with an optical microscope. The maximum absorption in a pulsed discharge with a peak current of 160 μA amounted 6% in one pass of the laser beam through the panel of 200-μm gap. This gives the path averaged density of 6.7×1012 cm−3. Measured spatio-temporal characteristics of the excited atoms are discussed in a comparison with a one-dimensional simulation by a fluid model.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.112154
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  • 4
    Electronic Resource
    Electronic Resource
    Vacuum-ultraviolet laser absorption spectroscopy for absolute measurement of fluorine atom density in fluorocarbon plasmas (1999)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 74 (1999), S. 2390-2392 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Absolute density measurement of fluorine atoms has been performed by a vacuum-ultraviolet (VUV) laser absorption technique in fluorocarbon plasmas. A VUV laser tunable around 95 nm covering the resonance lines of F atoms has been produced in Xe gas by a two-photon resonance four-wave-mixing technique. In this method, the background absorption by the parent gases and species produced in the plasma can be eliminated by scanning the wavelength, and the absolute density of F atoms can be derived accurately from the integrated absorption line profile. The measured values of the density varied from 1×1011 to 4×1012 cm−3, depending on the source gas species and the operating conditions of an inductively coupled radio-frequency (400 kHz) discharge. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.123861
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