ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The microwave photoconductivity scanning microscope (MPSM) is a new experimental tool for the space-resolved contact-free characterization of photoconductive materials. It allows the determination of the local photoconductivity down to a resolution determined by the width of the laser beam and the diffusion length of photogenerated carriers. The reflected laser light can be measured simultaneously, which allows one to correlate the microwave signals with the surface morphology and to correct them for the absorbed light intensity. Structural, mechanical, thermal, and chemical surface treatments of monocrystalline and polycrystalline silicon wafers have been performed to demonstrate the technical applications and the scientific value of the described experimental technique. For the first time a contact-free space-resolved characterization of a heterojunction between n-silicon and p-type polymeric film is presented. Possibilities and limitations of the technique are outlined.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1140640
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