Library

feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 86 (1999), S. 5356-5364 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Plasma uniformity has been recognized as a significant parameter in large-sized high density plasma processing tools, but neutral uniformity issues have received less attention. In this article we show experimental and modeling results which indicate that significant neutral uniformity variations can occur in high density plasma processing tools. The experiments are carried out in both inductively coupled plasma and helicon plasma sources. A movable static pressure gauge is used to obtain the static radial neutral pressure distribution both with and without a discharge present. Without a wafer present in the reactor, significant (∼20%–40%) reductions in neutral pressure are observed in these sources during steady-state plasma operations. This spatially averaged neutral depletion is accompanied by hollow neutral pressure profiles. The degree of on-axis neutral depletion depends upon both plasma density and neutral fill pressure. We show that the "plasma pumping" effect, wherein electron impact ionization of neutral particles is followed by their rapid removal from the plasma by the pre-sheath electric field, can reproduce the experimental results. This effect has the potential to result in large (∼50%) neutral density variation across 300 mm wafers in high density plasma sources. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 2
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Intermittent plasma objects (IPOs) featuring higher pressure than the surrounding plasma, and responsible for ∼50% of the E×BT radial transport, are observed in the scrape off layer (SOL) and edge of the DIII-D tokamak [J. Watkins et al., Rev. Sci. Instrum. 63, 4728 (1992)]. Conditional averaging reveals that the IPOs, produced at a rate of ∼3×103 s−1, are positively charged and also polarized, featuring poloidal electric fields of up to 4000 V/m. The IPOs move poloidally at speeds of up to 5000 m/s and radially with E×BT/B2 velocities of ∼2600 m/s near the last closed flux surface (LCFS), and ∼330 m/s near the wall. The IPOs slow down as they shrink in radial size from 4 cm at the LCFS to 0.5 cm near the wall. The IPOs appear in the SOL of both L and H mode discharges and are responsible for nearly 50% of the SOL radial E×B transport at all radii; however, they are highly reduced in absolute amplitude in H-mode conditions. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 3
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The paradigm of shear suppression of turbulence as the mechanism for the low to high confinement mode (L to H) transition is examined by quantitative comparison of the predictions of the paradigm with experimental results from the DIII-D tokamak [Plasma Physics and Controlled Fusion Research (International Atomic Energy Agency, Vienna, 1986), p. 159]. The L to H transition trigger is V×B rotation, not the main ion pressure gradient. The radial electric field Er shear increases before the fluctuation suppression, consistent with increasing Er shear as the cause of the turbulence suppression. The spatial dependence of the turbulence reduction is consistent with shear suppression for negative Er shear. For positive Er shear, the turbulence suppression is consistent with the effect of Er curvature for modes for which an Er well is destabilizing. Finally, the transport barrier depends on the phase angle between the density and potential fluctuations inside the Er well, an effect not included in existing L to H transition models. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 4
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The first probe measurements of edge turbulence and transport in a neutral beam induced high confinement mode (H-mode) are reported. A strong negative radial electric field is directly observed in H-mode. A transient suppression of normalized ion saturation and floating potential fluctuation levels occurs at the low confinement mode to high confinement mode (L–H) transition, followed by a recovery to near low mode (L-mode) levels. The average poloidal wave number and the poloidal wave-number spectral width are decreased, and the correlation between fluctuating density and potential is reduced. A large-amplitude coherent oscillation, localized to the strong radial electric field region, is observed in H-mode but does not cause transport. In H-mode the effective turbulent diffusion coefficient is reduced by an order of magnitude inside the last closed flux surface and in the scrape-off layer. The results are compared with a heuristic model of turbulence suppression by velocity-shear stabilization.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 1 (1994), S. 3193-3198 
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: It has been shown in an earlier paper [Phys. Fluids B 5, 344 (1993)] that the ion flow speed of a plasma can be much smaller than the E×B speed in a strongly double-sheared electric field. In this paper, the stability of the plasma is investigated. It is found that a new instability, driven by the difference between the ion and electron flow speed, occurs and may dominate the Kelvin–Helmholtz (KH) instability in a nonuniform plasma. This new instability has a driving mechanism similar to that of the Simon–Hoh instability and is thus called the collisionless Simon–Hoh (CSH) instability. When the CSH instability dominates, the plasma does not become more unstable as the electric field is increased, in contrast to scenarios where the KH instability is dominant.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 6
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 8 (2001), S. 2691-2699 
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Sheared flows, thought to be generated by turbulence in magnetized fusion plasmas, are predicted to mediate the transport of mass, momentum, and heat across the shear flow region. In this paper we show that an examination of three-wave coupling processes using the bispectrum and bicoherence of turbulent fields provides an experimentally accessible test of the turbulence-generated shear flow hypothesis. Results from the Continuous Current Tokamak (CCT), Princeton Beta Experiment–Modified (PBX–M), and DIII–D tokamaks indicate that the relative strength of three-wave coupling increases during low-mode to high-mode (L–H) transitions and that this increase is localized to the region of strong flow and strong flow shear. These results appear to be qualitatively consistent with the turbulence-generated shear flow hypothesis. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 7
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The role of neutrals as a driving force of plasma turbulence was investigated in the TJ-I tokamak [Phys. Fluids B 5, 4051 (1993)]. No influence of the local neutral source strength on fluctuation levels was found, neither in the plasma bulk side nor in the scrape-off layer side of the velocity shear layer location. Helium puffing was used to study the influence of impurity radiation on turbulence in the Princeton Beta Experiment-Modified (PBX-M) [Plasma Physics and Controlled Nuclear Fusion Research 1988 (International Atomic Physics Agency, Nice, 1989), Vol. 1, p. 97]. Evidence of fluctuation levels modified increasing He-impurity radiation was obtained. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 8
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Electron density profile measurements have been obtained on PBX-M by amplitude modulation reflectometry. With this technique, the measurement of the time delay is obtained from the phase delay of the modulating envelope (200 MHz in PBX-M). The system operates with the extraordinary mode, in the range 32–50 GHz. Under these conditions the density profile of PBX-M can be probed from the scrape-off layer up to typically r/a=0.7. With a final bandwidth of 40 kHz, the reflectometer is able to obtain the edge profile in 1 ms. The profiles obtained are relatively noise free and in good agreement with Thomson scattering measurements. Perturbations due to the strong-edge turbulence are kept to a minimum, and no software filtering or other signal processing was necessary to extract the time delay information from the raw data. Profiles have been measured for ohmic and Neutron Beam Injection heated discharges. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
  • 9
    Electronic Resource
    Electronic Resource
    New York, NY : American Institute of Physics (AIP)
    Physics of Fluids 5 (1993), S. 344-349 
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Ion orbits and equilibrium ion flow in crossed electric and magnetic fields are examined for the case of a strongly nonuniform electric field such as found in edge plasmas of tokamak fusion experiments and in space plasmas. It is shown that the E×B drift approximation no longer applies, either to the motion of a single ion or to the collective response of the ion species when the absolute value of the shear parameter, ||ζ||, defined as the absolute value of the ratio of the gradient of E×B speed to ion gyrofrequency, is order one. It is also found that the ion velocity is strongly dependent on the electric field geometry. The results suggest that the existence of a strongly sheared electric field does not necessarily indicate the existence of strongly sheared plasma flow, and that the spatial shape of the electric field, when ||ζ|| is order one, may be a dominant factor in determining the resulting plasma flow speed.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
    BibTip Others were also interested in ...
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...