ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
A new contrast enhanced lithography (CEL) process using Chinese rosin as a binder is described. This binder is soluble in both non-polar organic solvent and aqueous alkaline solution. Good coatability with organic solvent, no formation of mixing layer, and direct development without removing the CEL layer are the major advantages of this process. Among the three different kinds of photobleachable dyes, DZ-2 (diazonium salt) has the best optical property and the resist profile is improved on g-line reduction projection printing at the smallest dose. Moreover, this DZ-2 - Chinese rosin system is also effective at 365 nm, and the resist profile and the focus margin are improved on i-line reduction projection printing by using this system.
Additional Material:
15 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760291404
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