ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The x-ray lithography and micromachining facility at CAMD is described. It consists of four dedicated beamlines and exposure stations using the synchrotron radiation delivered by the CAMD storage ring and 230 m2 of fully equipped clean room. The scientific and engineering activities exemplified by results of current studies are reported. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1147311
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