Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
54 (1989), S. 286-288
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A Fresnel zone plate lens, with a nominal outer zone width of 400 A(ring), has been used to image nanostructures with soft x-ray synchrotron radiation at 45 A(ring) wavelength with the Göttingen x-ray microscope at BESSY in Berlin. The structures, consisting of gold lines in thin silicon nitride membranes, were selected for tests of spatial resolution and image forming capabilities. Several patterns associated with deep submicron electronic circuits were also imaged, showing clearly resolved features smaller than 0.1 μm. Images of periodic structures, including 600 A(ring) lines on 2000 A(ring) centers, suggest a spatial resolution approaching the theoretical limit of approximately 500 A(ring).
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.100990
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