ISSN:
1573-482X
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract The investigation of thermal stability of WN x /GaAs Schottky contacts prepared by selective ion implantation of nitrogen into tungsten film has been demonstrated. Auger electron spectroscopy was used for characterization of thermal stability of the interfaces after rapid thermal annealing at 950
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00224740
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