ISSN:
1573-4846
Keywords:
sol-gel method
;
microelectronics
;
planarization
;
ferroelectrics
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract It is presented a brief overview of our results in the field of harnessing sol-gel techniques for promoting thin films in microelectronics technology. We discuss the problem of multilevel interconnection of IC, preparation of ferroelectric films, taper etching of oxide films, formation of isolating and passivating coatings on compound semiconductors, production of barrier zirconia and titania films, as well as certain aspects of practical use of the method in microelectronics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00486310
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