ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A reconstructed Si single crystal surface was fluorinated using xenon fluoride. All dangling bonds on the 2×1 reconstructed surface of Si(100) were terminated by fluorine atoms, and Si—F bonds were generated. However, dimer bonds remained after the treatment. This is different from the situation where dimer bonds are easily terminated by hydrogen atoms in a hydrogenation treatment. A bulky Si—F group is considered to sterically hinder fluorine termination of a dimer bond. Also, only an adatom bond seems to be terminated by a fluorine atom in the fluorination treatment of a Si(111) 7×7 reconstructed surface. When the fluorinated Si(100) surface was exposed to the atmosphere, dimer bonds were observed to be oxidized immediately. Also following the reaction, the backbond of the Si—F group is oxidized and the S—F bond itself was hydrolyzed. The fluorinated surface, which is chemically active, differs from the hydrogen-passivated surface.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.357496
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