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  • 1
    Electronic Resource
    Electronic Resource
    Westerville, Ohio : American Ceramics Society
    Journal of the American Ceramic Society 83 (2000), S. 0 
    ISSN: 1551-2916
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: High-density lead zirconate titanate (PZT) ceramics were fabricated for the first time at a temperature as low as 800°C via the hot isostatic pressing (HIP) of a PZT powder with a modified composition of 0.92Pb(Zr0.53Ti0.47)O3—0.05BiFeO3—0.03Ba(Cu0.5W0.5)O3 that contained 0.5 mass% MnO2. The resultant PZT ceramics exhibited a microstructure that was denser and finer than that of PZT sintered at 935°C, which is the lowest temperature for the densification of the same composition via normal sintering. The relevant dielectric and piezoelectric properties of the HIPed PZT ceramics were as follows: coefficient of electromechanical coupling (K31), 31.8%; mechanical quality factor (Qm), 1364; piezoelectric constant (d31), −73.7 × 10−12 C/N; relative dielectric constant (ɛ33T/ɛ0), 633; dielectric loss factor (tan δ), 0.5%; Curie temperature (Tc), 285°C; and density (ρ), 8.06 g/cm3. In addition to these reasonably good piezoelectric properties, the HIPed PZT exhibited better mechanical properties—particularly, higher fracture strength—than the normally sintered PZT.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Westerville, Ohio : American Ceramics Society
    Journal of the American Ceramic Society 82 (1999), S. 0 
    ISSN: 1551-2916
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: A deep reactive ion etching (RIE) technique that uses sulfur hexafluoride (SF6) gas has been developed for lead zirconate titanate (Pb(Zr,Ti)O3, PZT) three-dimensional microfabrication from PZT ceramic blocks. The etching was performed by using an inductively coupled plasma that was generated in a narrow-gap vacuum chamber. The etch depth was 70 µm with a maximum etch rate of 0.3 µm/min and a selectivity of PZT to the electroplated nickel mask of 〉35:1. The sidewalls of the PZT structures were tapered, with base angles of ∼75°. Both positive RIE lag and unexpected ultrafine-slit etching phenomena were observed.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Westerville, Ohio : American Ceramics Society
    Journal of the American Ceramic Society 82 (1999), S. 0 
    ISSN: 1551-2916
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: A new lost-mold process to fabricate piezoceramic microrods for 1–3 piezocomposites has been developed. A Si wafer was machined as a mold with a regular array of columnar cavities having a negative structure of piezoceramic microrods, by deep reactive ion etching (RIE). A lead zirconate titanate (PZT) slurry was cast into the Si mold and calcinated to burn out the binder, and fully condensed in the cavities by the glass-encapsulated hot isostatic pressing technique. Finally, the Si mold was selectively removed by XeF2 etching. PZT microrods with high aspect ratios (diameter 〈12 μm, aspect ratio 〉14), which can be used to construct high-resolution micro-ultrasonic transducers for medical imaging, were fabricated successfully by the present process.
    Type of Medium: Electronic Resource
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