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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 86 (1999), S. 5870-5878 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Spin-on xerogels, which are promising candidates for use as interlayer dielectric materials in future microelectronic devices, change from a Newtonian liquid to a solid gel during processing. Since the rheology of the sol may affect the uniformity of the xerogel films produced, here we relate the rheology of a two-step, acid-base catalyzed, sol-gel system to the thickness and porosity profiles across xerogel films of importance to the microelectronics industry. We also analyze the effect of spin speed on the thickness and porosity of the films. Our rheological studies of the xerogel sol demonstrated that the sol changes from Newtonian far from the gel point, to shear thinning close to the gel point. On films spin coated with shear-thinning sols there is a region of uniformity extending for a distance of about 5 mm from the center. The film thickness and porosity are highest in this region and both quantities decrease towards the edge. If the sol is spun in its Newtonian regime, the resulting films are uniform (〈3% thickness and porosity). The predictions of film thickness and uniformity based on simple models for spin coating a Newtonian and truncated power law fluid were found to be in good agreement with the experimental observations. The film thickness was varied from 0.485 to 1.9 μm by adjusting the spin coating speed from 5900 to 1000 rpm. Over this sixfold range of speed, the porosity was almost constant and varied by less than 10% while the thickness varied by about a factor of 4. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 33 (1987), S. 1-10 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: A model for surface shear in the contact line region of a steady state two-component evaporating thin film in the shape of a meniscus is developed. A constant vapor pressure boundary condition at the liquid-vapor interface is combined with experimental meniscus profile data to obtain temperature and composition profiles. The results are used to delineate the relative effects of meniscus shape, temperature, and composition on fluid flow toward the higher temperature in an evaporating meniscus. For the system analyzed, it is found that surface shear due to composition gradients and temperature gradients is the single most important contribution to flow in the evaporating, two-component capillary meniscus in the film thickness range 10-6 m ≤ δ ≤ 10-5 m. The effect of concentration on the vapor pressure leads to a maximum evaporation rate at a thickness of approximately 6 μm for the conditions studied. Theoretical results are discussed in the light of experimental observations.
    Additional Material: 18 Ill.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 11 (1965), S. 858-865 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Suction nucleate boiling (consisting of saturated pool boiling on a porous heat source with the generated vapor exhausting through the pores) was investigated experimentally and theoretically. The experimental results demonstrated that: (1) interfacial free energy can be used to direct the flow of liquid and vapor in a desired direction and to separate vapor from liquid at the point of vapor generation; (2) the heat transfer coefficient for suction nucleate boiling is higher than that associated with normal boiling; and (3) a porous heat exchanger can be designed to give stable transition from nucleate to film boiling. The theoretical analysis, which was based on experimental observations, indicated that extremely high heat fluxes and heat transfer coefficients are possible with small pores. Comparison of the experimental and theoretical results demonstrated that the full potential of suction nucleate boiling was not attained in the experiments and indicated some of the experimental refinements neededto attain this potential.
    Additional Material: 6 Ill.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 11 (1965), S. 59-64 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Experimental equipment to study the film boiling of liquid nitrogen on a porous heat source with vapor suction was developed. The electrically heated element was a 3.69 in. sintered stainless steel screen, which was also used as a resistance thermometer in conjunction with an a.c. potentiometric circuit. In preliminary work, this mode of heat transfer was unstable, but stability was achieved by placing a porous flow control element on the liquid side of the heater. It was found that the Nusselt number was a function of only the Reynolds number; the heat transfer coefficient was increased by a factor of as much as 2.5 over the heat transfer coefficient in normal film boiling; it was possible to vary independently any two of the three variables, heat flux, flow rate through the plate, and temperature difference; and the generated vapor was considerably superheated. Fluctuations in the local surface temperature were measured in film boiling from both porous and nonporous flat plates, indicating that momentary solid-liquid contacts can occur, for all practical purposes, in film boiling.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 17 (1971), S. 569-574 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Effective experimental and theoretical techniques for studying the heat transfer characteristics of a stationary evaporating meniscus formed on a flat plate immersed in a pool of liquid were developed. Integral heat transfer data were obtained for the four systems: 304 stainless steel-water, 6061 aluminum-water, 304 stainless steel-methanol, and 6061 aluminum-methanol. High rates of heat transfer were obtained in the triple interline region with a stable meniscus. Detailed descriptions of the heat flux and temperature field were obtained for the stainless steel-water and stainless steel-methanol systems. The effect of the evaporation coefficient on the heat flux distribution was evaluated. The heat transfer process in the interline region proved to be more efficient than a simple conduction process in an evaporating liquid meniscus.
    Additional Material: 6 Ill.
    Type of Medium: Electronic Resource
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