Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
60 (1986), S. 1949-1951
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A novel device, the "hollow oval magnetron,'' was designed and characterized. The device has a hollow electrode with an oval cross section. It sustains a large-area uniform plasma with low-energy ions under low pressure and moderate rf power (Ni ∼1011 cm−3, Γi ∼0.5 mA/cm2, Ei ∼30 eV, and P∼5 mTorr). The energy distribution of ion current onto the hollow electrode has a broad spread ΔEi /E¯i ∼1 in the rf mode, and a narrow peak ΔEi/ E¯i ∼0.1 with a low-energy tail in the dc mode. The device is a good candidate for low-energy high-rate plasma-material processing.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.337195
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