ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract A multilayer AIN-W cofired body has been developed using the pressless sintering technique. Effects of additives, such as Y2O3, CaO, La2O3, MgO, Al2O3 and SiO2, on the sheet resistance of W conductor were studied. The sheet resistance of the W conductor increases with increasing additives in the W paste. However, the oxides can be divided into two groups. The effect of the first group on sheet resistance is different from that of the second group.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00355919
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