ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
In order to measure the mechanical properties of gold films on silicon substrate, twotypes of specimens, i.e., bridged films and circular membranes, are manufactured. Using a wedgetip, the bridged gold films are indented so that the films are pushed off, which is called as V-peeltest. The load-deflection curves obtained by the V-peel test are analyzed with the concept ofgeometrically nonlinear beam by using the minimum potential energy theory together with Ritzmethod. Thus, Young’s modulus and residual stress of the bridged gold films are obtained. Blistertest is also conducted to measure the Young’s modulus and residual stress of a circular goldmembrane, of which deformation is measured by Twyman-Green interferometer. By graduallyincreasing the external pressure applied on the membrane, the interfacial fracture toughnessbetween the gold membrane and silicon substrate is measured based on the concepts of interfacialfracture mechanics
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/52/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.326-328.227.pdf
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