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  • 1
    Electronic Resource
    Electronic Resource
    Springer
    Applied physics 20 (1979), S. 207-211 
    ISSN: 1432-0630
    Keywords: 79.20N
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract The energy distribution of atoms and molecules sputtered from a polycrystalline GaAs sample with a 6 keV Ar ion beam have been measured. The temperature of the target ranged from 30°C to 350°C. Total sputtering yield of the investigated sample has also been measured. The results clearly show that there is a large contribution of molecular component in the sputtered flux and that the molecular component increases above 250°C in comparison to the atomic components thus yielding an increase in the total sputtering yield, as observed previously by Brozdowska et al. The enhanced molecular component at temperatures above 250°C can be explained by the appearance of a spike effect. The results obtained at low temperature can be explained in terms of the collision cascade mode. There is no contribution of beam-induced thermal vaporization to the sputtering of GaAs.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 68 (1990), S. 5169-5175 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Polycrystalline α-Al2O3 and yttria-stabilized ZrO2 substrates were coimplanted with 175-keV Mo+ and 74-keV S+ at doses of 1×1017 and 74-keV S+ and 2×1017 cm−2, respectively. An amorphous SiO2 substrate was coimplanted with 175-keV Mo+ and 74 keV S+ at doses of 4.97×1016 and 1.02×1017 cm−2, respectively. The energies of Mo+ and S+ ions were chosen to obtain a nearly overlapping depth profiles in all three substrates. Transmission electron microscopy, Rutherford backscattering, and Auger electron spectroscopy techniques were used to characterize the ion-implanted materials. The formation of MoS2 phase was observed in the as-implanted condition as well as after annealing at 700 °C in all substrates. Thermodynamic calculations were performed to predict the equilibrium binary phase formed in Al2O3, ZrO2, and SiO2 under the present implantation and annealing conditions. The predictions agree with the experimental findings.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 65 (1989), S. 1885-1887 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Sintered α-SiC and hot-pressed Si3N4 were coimplanted with 175 keV Ti+ and 46 keV C+ at doses of 1×1017 cm−2. Energies of Ti+ and C+ were such that the depth distributions match closely. The samples were annealed at 1200 °C for 2 h in flowing Ar. The samples were characterized by Rutherford backscattering and cross-section transmission electron microscopy. The distribution of Ti in α-SiC remained unaltered after the anneal whereas significant redistribution occurred in Si3N4. Cross-section transmission electron microscopy revealed the formation of TiC precipitates in the recrystallized surface layer of SiC. Although some precipitates were found to be present in the recrystallized surface layer of Si3N4, the diffraction analysis revealed that these are not TiC.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 63 (1988), S. 2257-2259 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The mixing rates of the Ni-Pt and René N4-Pt systems under high-energy ion bombardment were measured using Rutherford backscattering spectroscopy. The mixing was induced by various fluences of 1-MeV Pt+ ions. The extent of mixing in René N4-Pt was the same as in Ni-Pt, suggesting the absence of any effects of high voume fraction of ordered second phase (gamma prime) on the mixing phenomenon in the former system. The amounts of mixing predicted by the model based on thermochemical effects were very close to those measured, while cascade collision theory could account for only 2%–3% of the mixing.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 61 (1987), S. 4791-4794 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: High-energy ion irradiation effects on the surfaces of α-silicon carbide (SiC) and hot-pressed silicon nitride (Si3N4) were studied by optical microscopy, surface profilometry, Auger electron spectroscopy, and transmission electron microscopy (TEM) techniques. Optical microscopy and surface profilometry revealed that 1-MeV Ni+ ion irradiation at a dose of 1×1016 cm−2 produces swelling and roughness on both SiC and Si3N4. Auger electron spectroscopy in combination with sputtering revealed that the SiC surface becomes C rich, whereas the Si3N4 surface becomes Si rich due to ion irradiation. Cross-section TEM analysis of the surface layer of irradiated SiC showed that about 1 μm of material at the surface has become amorphous due to irradiation with 1-MeV Ni+ at a dose of 1×1016 cm−2. Amorphization has also been observed in Si3N4. These results are discussed with reference to the information available in the literature.
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 58 (1985), S. 2798-2798 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Type of Medium: Electronic Resource
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  • 7
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 61 (1987), S. 5263-5266 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Ion beam mixing of B, ZrO2, and Cr layers with sintered α-SiC, and Y and Cr layers with hot pressed Si3N4 was measured at room temperature. The mixing ion was selected from 1-MeV Ni+, 2-MeV Au+, or 1-MeV O+ ions. The amount of mixing was evaluated from Rutherford backscattering and Auger electron spectroscopies and occasionally from cross-section transmission electron microscopy. It was found that mixing takes place in the B/SiC, Cr/SiC, and Y/Si3N4 systems. No mixing is observed in the ZrO2/SiC and Cr/Si3N4 systems even after high dose ion bombardment. The enthalpy of mixing rule, which states that metals mix with insulators if the reaction enthalpy is negative and do not mix if it is positive, has been examined and found to hold for these systems.
    Type of Medium: Electronic Resource
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  • 8
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 58 (1985), S. 248-252 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Cross-sectional transmission electron microscopy and Rutherford backscattering techniques were employed to study the mixing rates of NiMo and NiTi binary systems under high-energy ion bombardment. Mixing was carried out by using 1-MeV Au+ ions at various doses. Results show that the amount of mixing of NiTi is about three times higher than NiMo. Cascade collision theory can only account for a maximum of 20% difference in the amount of mixing of these two systems. However, a model based on thermodynamics has been found to predict correctly the amount of mixing of these two systems.
    Type of Medium: Electronic Resource
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  • 9
    Electronic Resource
    Electronic Resource
    Springer
    Journal of materials science 21 (1986), S. 1675-1680 
    ISSN: 1573-4803
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Abstract The interactions of co-evaporated Ti0.3W0.7 films with GaAs have been studied after annealing at temperatures in the range of 650 to 900° C for 15 min employing Rutherford backscattering, transmission and scanning electron microscopy. X-ray diffraction and energy-dispersive X-ray analysis techniques. Reaction has been found to take place at 650° C as evidenced by the presence of an AsTi compound in the region near the interface of TiW film and GaAs. Gallium diffuses out to the surface at temperatures above 750° C and causes surface morphological degradation, which can be related to the instability of the TiW Schottky barrier height at higher temperatures ≳750° C as reported in the literature.
    Type of Medium: Electronic Resource
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  • 10
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 3 (1981), S. 118-125 
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The limitations of using ion sputtering for interfacial analysis are reviewed. It is concluded that many artifacts may degrade interfacial resolution - surface roughness, zone of mixing, bulk and surface diffusion, implantation, residual gas adsorption and matrix effects. Techniques to minimize these limitations are suggested. Some examples are: use of reactive ion beams, multiple ion beams, sample rotation and special mounting, varying the ion energy and incidence angle, and deconvolution. It is concluded, however, that sputtering may destroy atomic arrangement and chemical state information at the interface, and new approaches are needed to determine these interfacial parameters.
    Additional Material: 7 Ill.
    Type of Medium: Electronic Resource
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