ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Techniques for the investigation of impurities in gallium arsenide crystals using mass spectrometry are described. The results obtained show a fair correlation with electrical measurements. Flat-bottomed etch pits are found which can be correlated with the oxygen content. The use of silica, boron nitride, alumina, and vitreous carbon crucibles is shown to contaminate the crystals. For crystals grown from silica crucibles, the silicon content decreases rapidly with increasing arsenic pressure during growth. From the distribution of impurities along the lengths of crystals, a number of distribution coefficients have been estimated.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00549572
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